JPS6373357U - - Google Patents
Info
- Publication number
- JPS6373357U JPS6373357U JP16811386U JP16811386U JPS6373357U JP S6373357 U JPS6373357 U JP S6373357U JP 16811386 U JP16811386 U JP 16811386U JP 16811386 U JP16811386 U JP 16811386U JP S6373357 U JPS6373357 U JP S6373357U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- target
- vacuum container
- ion
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 238000001659 ion-beam spectroscopy Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16811386U JPS6373357U (en]) | 1986-11-04 | 1986-11-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16811386U JPS6373357U (en]) | 1986-11-04 | 1986-11-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6373357U true JPS6373357U (en]) | 1988-05-16 |
Family
ID=31100688
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16811386U Pending JPS6373357U (en]) | 1986-11-04 | 1986-11-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6373357U (en]) |
-
1986
- 1986-11-04 JP JP16811386U patent/JPS6373357U/ja active Pending
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